Reactor for fluidized bed silane decomposition

Details Reactor for fluidized bed silane decomposition Reactor for fluidized bed silane decomposition

1985-07-30

1989-04-04

Kratz, Peter

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Fluidized bed

422146, 422199, B01J 818

Patent

active

048184950

ABSTRACT:
An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.

REFERENCES:
patent: 2968683 (1961-01-01), Kossman
patent: 3499947 (1970-03-01), Johnson
patent: 3644100 (1972-02-01), Lhonore et al.
patent: 4176710 (1979-12-01), Gansauge et al.
patent: 4207360 (1980-06-01), Padovani

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