Cleaning and liquid contact with solids – Apparatus – With means for collecting escaping material
Reexamination Certificate
2011-07-12
2011-07-12
Stinson, Frankie L (Department: 1711)
Cleaning and liquid contact with solids
Apparatus
With means for collecting escaping material
C134S16700R, C134S16800C
Reexamination Certificate
active
07975709
ABSTRACT:
In a reactor cleaning apparatus1which cleans an inner wall surface72of a reactor70which generates polycrystalline silicon, a bell jar of the reactor70has a dual structure, a through hole11is formed along a vertical direction at a central portion of a substantially disc-like tray10placed in a horizontal state, a flange portion13in which an opening edge of the reactor70is placed is formed at an outer peripheral portion of the tray10, a shaft20is provided through the through hole11of the tray10so as to be rotatable and movable in the vertical direction, a nozzle device50which sprays a cleaning water at high pressure in three-dimensional directions is provided at an upper end of the shaft20, a drive mechanism30which rotates the shaft20and moves the shaft in the vertical direction is provided at a base end of the shaft20, and steam piping62capable of supplying the steam within the bell jar of the reactor70is provided.
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European Search Report dated Jun. 10, 2009 for EP Application No. 09151031.3.
Endoh Toshihide
Ishii Toshiyuki
Sakaguchi Masaaki
Tebakari Masayuki
Edwards Angell Palmer & & Dodge LLP
Mitsubishi Materials Corporation
Stinson Frankie L
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