Reactor assembly and processing method

Details Reactor assembly and processing method Reactor assembly and processing method

2007-01-16

2007-01-16

Zervigon, Rudy (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S641000, C118S715000, C156S345370, C156S345330

Reexamination Certificate

active

10071908

ABSTRACT:
A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.

REFERENCES:
patent: 4839145 (1989-06-01), Gale et al.
patent: 4846102 (1989-07-01), Ozias
patent: 4993360 (1991-02-01), Nakamura
patent: 5044315 (1991-09-01), Ozias
patent: 5077875 (1992-01-01), Hoke et al.
patent: 5190592 (1993-03-01), Chazee
patent: 5228501 (1993-07-01), Tepman et al.
patent: 5244694 (1993-09-01), Ozias
patent: 5261960 (1993-11-01), Ozias
patent: 5288327 (1994-02-01), Bhat
patent: 5304247 (1994-04-01), Kondo et al.
patent: 5370738 (1994-12-01), Watanabe et al.
patent: 5405446 (1995-04-01), Nakajima et al.
patent: 5441568 (1995-08-01), Cho et al.
patent: 5685906 (1997-11-01), Dietze et al.
patent: 6093252 (2000-07-01), Wengert et al.
patent: 6143079 (2000-11-01), Halpin
patent: 6185839 (2001-02-01), Kholodenko et al.
patent: 6254933 (2001-07-01), Habuka et al.
patent: 6325858 (2001-12-01), Wengert et al.
patent: 6355108 (2002-03-01), Won et al.
patent: 6383330 (2002-05-01), Raaijmakers
patent: 6464792 (2002-10-01), Wengert et al.
patent: 6583638 (2003-06-01), Costello et al.
patent: 02-152251 (1990-06-01), None

Affiliated with

Also associated with

Rating

Reactor assembly and processing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reactor assembly and processing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reactor assembly and processing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3794051