Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate
2006-03-03
2010-02-09
Vanoy, Timothy C (Department: 1793)
Chemistry of inorganic compounds
Silicon or compound thereof
Elemental silicon
C423S349000, C422S139000, C422S143000
Reexamination Certificate
active
07658900
ABSTRACT:
In a reactor for the decomposition of a silicon-containing gas, provision is made, to avoid silicon deposition on an inner wall of a reactor vessel, for at least one catalytically active mesh to be provided within a reaction chamber between at least one gas feed line and the inner wall (4). The mesh accelerates the thermal decomposition of the gas and reduces the deposition of silicon on the inner wall. Also described is a process for the preparation of silicon using the reactor according to the invention and the use in photovoltaics of the silicon prepared.
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Berthold Rico
Beyer Christian
Müller Armin
Pätzold Carsten
Sill Torsten
Joint Solar Silicon GmbH & Co. KG
McGlew and Tuttle , P.C.
Rump Richard M
Vanoy Timothy C
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