Reactively sputtered chrome silicon nitride resistors

Details Reactively sputtered chrome silicon nitride resistors Reactively sputtered chrome silicon nitride resistors

1985-10-07

1987-07-21

Buffalow, Edith

Stock material or miscellaneous articles

Composite

Of quartz or glass

428450, 4285395, 427 96, B32B 1500

Patent

active

046818120

ABSTRACT:
A thin film having high electrical resistivity is produced on a substrate by radio frequency sputtering from a chrome/silicon source in a nitrogen/argon atmosphere.

REFERENCES:
patent: 4392992 (1983-07-01), Paulson et al.

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