Reactive matrix for removing moisture from a fluorine containing

Details Reactive matrix for removing moisture from a fluorine containing Reactive matrix for removing moisture from a fluorine containing

1998-04-29

2000-03-07

Spitzer, Robert

Gas separation: processes

Solid sorption

Inorganic gas or liquid particle sorbed

95139, 95140, 95900, 96108, 96153, B01D 5304, B01D 5328

Patent

active

060334606

ABSTRACT:
A process and composition for removing moisture from a NF.sub.3 or F.sub.2 gas wherein the gas is contacted with alumina particles coated with aluminum trifluoride. The aluminum trifluoride is formed by reacting alumina particles with an aqueous solution of hydrogen fluoride.

REFERENCES:
patent: 4853148 (1989-08-01), Tom et al.
patent: 4925646 (1990-05-01), Tom et al .
patent: 5656064 (1997-08-01), Golden

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