Etching a substrate: processes – Forming or treating optical article
Patent
1993-09-20
1995-05-23
Dang, Thi
Etching a substrate: processes
Forming or treating optical article
216 57, 216 66, 216 47, 216 79, 216 77, B44C 100
Patent
active
054177995
ABSTRACT:
A process is provided for modifying a surface of a large area, non-planar substrate to form micro structures therein that alter its optical properties. The process includes forming the micro structures by reactive ion beam etching through a chosen pattern that has been prepared on the surface.
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Daley Thomas W.
Garvin Hugh L.
Robinson Klaus
Schaub Charles L.
Dang Thi
Denson-Low W. K.
Hughes Aircraft Company
Lachman M. E.
Sales M. W.
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