Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2011-05-24
2011-05-24
Leykin, Rita (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C318S687000, C318S560000, C318S686000, C310S012010, C310S036000, C310S010000, C310S013000, C310S015000, C414S806000, C414S788000, C248S406200, C248S913000, C173S162100
Reexamination Certificate
active
07948198
ABSTRACT:
Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.
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Leykin Rita
Squire Sanders & Dempsey (US) LLP
Sumitomo Heavy Industrie's, Ltd.
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