Reaction chamber for manufacturing a carbon nanotube,...

Details Reaction chamber for manufacturing a carbon nanotube,... Reaction chamber for manufacturing a carbon nanotube,...

2007-06-18

2009-11-17

Griffin, Walter D (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including heat exchanger for reaction chamber or reactants...

C422S211000, C118S715000, C423S44500R, C423S447100, C423S447300, C977S842000, C977S843000, C977S855000

Reexamination Certificate

active

07618599

ABSTRACT:
Disclosed are a reaction chamber for manufacturing a carbon nanotube, an apparatus for manufacturing a carbon nanotube and a system for manufacturing a carbon nanotube. The reaction chamber includes a reaction furnace, a gas inlet, a gas outlet and a heat transfer member. The reaction furnace has a box structure for receiving a substrate wherein the reaction furnace provides a space for forming the carbon nanotube on the substrate. The gas inlet having a through-hole structure formed at a first portion of the reaction furnace and the gas outlet has a through-hole structure formed at a second portion of the reaction furnace. The heat transfer member has at least one rectangular through-hole structure formed at a third portion of the reaction furnace along a direction substantially in parallel to the substrate. The apparatus includes the reaction furnace, a gas supply member, a gas exhausting member and a heating member. The system includes the apparatus and a transfer apparatus.

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