Re-assembly process for MEMS structures

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S842000, C029S844000, C324S762010, C324S754090, C438S462000, C438S464000

Reexamination Certificate

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07010854

ABSTRACT:
Methods of fabricating an array of aligned microstructures on a substrate are disclosed. The microstructures may be spring contacts or other microelements. The methods disclosed include construction of an alignment substrate, alignment of die elements with the alignment substrate, and fixation of the aligned die elements to a backing substrate.

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