Rare earth-oxides, rare earth-nitrides, rare...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – On insulating substrate or layer

Reexamination Certificate

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C438S723000, C438S724000, C438S752000, C438S753000, C438S933000, C257SE21008, C257S561000

Reexamination Certificate

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11025680

ABSTRACT:
Atomic layer epitaxy (ALE) is applied to the fabrication of new forms of rare-earth oxides, rare-earth nitrides and rare-earth phosphides. Further, ternary compounds composed of binary (rare-earth oxides, rare-earth nitrides and rare-earth phosphides) mixed with silicon and or germanium to form compound semiconductors of the formula RE-(O, N, P)—(Si,Ge) are also disclosed, where RE=at least one selection from group of rare-earth metals, O=oxygen, N=nitrogen, P=phosphorus, Si=silicon and Ge=germanium. The presented ALE growth technique and material system can be applied to silicon electronics, opto-electronic, magneto-electronics and magneto-optics devices.

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patent: 5474976 (1995-12-01), Kondoh et al.
patent: 5728213 (1998-03-01), Kurata et al.
patent: 6362011 (2002-03-01), Massey et al.
patent: 6734453 (2004-05-01), Atanackovic et al.
patent: 2003/0183885 (2003-10-01), Nishikawa et al.

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