Rapid thermal processing (RTP) system with gas driven rotating s

Details Rapid thermal processing (RTP) system with gas driven rotating s Rapid thermal processing (RTP) system with gas driven rotating s

1997-11-24

1999-12-21

Leung, Philip H.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

118728, 118730, 392419, H05B 100

Patent

active

060052260

ABSTRACT:
An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.

REFERENCES:
patent: 4593168 (1986-06-01), Amada
patent: 4667076 (1987-05-01), Amada
patent: 4860687 (1989-08-01), Frijlink
patent: 5226383 (1993-07-01), Bhat
patent: 5444217 (1995-08-01), Moore et al.
patent: 5643366 (1997-07-01), Somekh et al.
P.M. Frijlink, A new versatile, large size MOVPE reactor , J. Crystal Growth 93, 207 (1988).

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