Electric heating – Microwave heating
Patent
1996-11-27
1998-08-18
Leung, Philip H.
Electric heating
Microwave heating
219711, 219762, 118725, 118723MW, 427595, H05B 668
Patent
active
057960798
ABSTRACT:
A rapid thermal processing method for a ceramic thin film which is capable of carrying out a uniform heating of a large sized wafer, and of achieving a rapid temperature elevation, and of enhancing a crystallinity of a deposited thin film, wherein a thin film-coated material is disposed on a support to rapidly heat the thin film by the application of microwaves, the temperature is measured with a temperature measuring unit, and the generation of the microwaves is halted at a required temperature.
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Jung Hyung Jin
Kim Do Kyung
Kim Tae Song
Kim Yoon Chang
Korea Institute of Science and Technology
Leung Philip H.
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