Rapid thermal processing method for ferroelectric, high dielectr

Electric heating – Microwave heating

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219711, 219762, 118725, 118723MW, 427595, H05B 668

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active

057960798

ABSTRACT:
A rapid thermal processing method for a ceramic thin film which is capable of carrying out a uniform heating of a large sized wafer, and of achieving a rapid temperature elevation, and of enhancing a crystallinity of a deposited thin film, wherein a thin film-coated material is disposed on a support to rapidly heat the thin film by the application of microwaves, the temperature is measured with a temperature measuring unit, and the generation of the microwaves is halted at a required temperature.

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