Electric resistance heating devices – Heating devices – Radiant heater
Patent
1994-08-30
1996-10-01
Walberg, Teresa J.
Electric resistance heating devices
Heating devices
Radiant heater
219405, 219411, 392424, 118725, F37B 514, F27D 1102, H01L 21324
Patent
active
055617352
ABSTRACT:
An apparatus and method for rapidly and uniformly heating a workpiece includes a plurality of walls defining a first chamber, a first source of radiation for producing incident radiation on a first energy transfer surface of the workpiece, a holder for holding the workpiece in a workpiece plane in the chamber and a radiation absorbing surface on at least one wall of the chamber. The holder has an energy transfer surface, the energy transfer surfaces of the holder and of the workpiece reflecting and emitting radiation in the chamber and the radiation absorbing surface particularly for absorbing radiation reflected and radiation emitted from the energy transfer surfaces.
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"Rapid Thermal Processing" Science and Technology. Edited by Richard B. Fair. Academic Press, Inc. Harcourt Brace Jovanovich, Publishers. Copyright .COPYRGT. 1993 by Academic Press Inc. 1 Rapid Thermal Processing--A Justification by Richard B. Fair. (pp. 1-11). 8 Issue in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing by B. Lojek. (pp. 311-347). 9 Manufacturing Equipment Issue in Rapid thermal Processing by Fred Roozeboom (pp. 349-423).
Pelham J.
Vortek Industries Ltd.
Walberg Teresa J.
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