Rapid thermal annealing using thermally conductive overcoat

Details Rapid thermal annealing using thermally conductive overcoat Rapid thermal annealing using thermally conductive overcoat

1994-01-14

1996-06-04

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437247, H01L 21324

Patent

active

055232620

ABSTRACT:
Apparatus and method for improved heating uniformity during rapid thermal annealing through the use of a sacrificial layer covering the surface to be annealed. The composition and thickness of the layer are chosen to be opaque at the frequencies emitted by a radiant energy source, usually a xenon arc lamp, and also to be thermally conductive. The sacrificial layer absorbs the radiant energy and conducts the resulting heat to the surface to be annealed. After the annealing is complete, the sacrificial layer is etched away or left as an overcoat.

REFERENCES:
patent: 4431459 (1984-02-01), Teng
patent: 4605447 (1986-08-01), Brotherton et al.
patent: 4615766 (1986-10-01), Jackson et al.
patent: 4621413 (1986-11-01), Lowe et al.
patent: 4845055 (1989-07-01), Ogata
patent: 5139971 (1992-08-01), Giridhar et al.
patent: 5336641 (1994-08-01), Fair et al.

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