Fishing – trapping – and vermin destroying
Patent
1992-01-21
1994-02-08
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
29 2501, 4272481, 427300, B05C 500
Patent
active
052848051
ABSTRACT:
A rapid switching rotating disk reactor has an elongated injector for injecting an inert gas into the chamber of a rotating disk reactor. The nozzle of the injector is proximate to the center of the rotating wafer for the purpose of providing an inert gas flow to produce an inert gas boundary layer above the wafer. Whenever the environment of the chamber is to be changed by an introduction of another fluid medium, the injector is activated to provide an inert boundary layer atop the semiconductor wafer, wherein any processing caused by the reactive gases in the chamber is prevented from occurring. Once the chamber is filled with the subsequent fluid medium, the injector is turned off in order for the next processing to commence.
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Journal of Crystal Growth, vol. 107, No. 1/4, Jan. 1, 1991, Amsterdam NL, G. S. Tompa et al., "MOVPE growth of II-VI compounds in a vertical reactor with high-speed horizontal rotating disk", pp. 198-202.
Chaudhuri Olik
Kidd William W.
Mason David
Sematech Inc.
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