Rapid process for the production of multilayer barrier layers

Details Rapid process for the production of multilayer barrier layers Rapid process for the production of multilayer barrier layers

2003-08-07

2008-07-15

Chen, Bret (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Plural coatings applied by vapor, gas, or smoke

C427S569000, C427S575000

Reexamination Certificate

active

07399500

ABSTRACT:
A process for applying alternating layers by chemical vapor deposition comprises the process steps of depositing an adhesion-promoter layer on a substrate and applying a barrier layer. Alternating layers comprising organic and inorganic materials are deposited alternately, and in this process the coating time for application of the adhesion-promoter layer is between 0.05 s and 4.0 s and the coating time for application of the inorganic barrier layer is between 0.1 s and 6.0 s. A composite material is also produced using the process.

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