Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1998-03-31
2000-03-07
Phan, James
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359202, 359205, G02B 2608
Patent
active
060348046
ABSTRACT:
A scanning system for scanning in first and second dimensions a desired surface topology of a sample, the scanning device comprising: a light source for producing a collimated light beam; a first scanning device responsive to the collimated light beam from the light source for producing a first scanned beam in a first dimension with a constant optical path length; and a second scanning device coupled between the first scanning device and the sample for focusing and scanning the first scanned beam in a second dimension onto the surface region of the sample to cause the collimated light beam to scan the surface topology of the sample with a constant optical path length in each of the first and second dimensions of the desired topology of the sample. In a second embodiment of the invention, a beam of light is focused by a first lens before a scanner and the scanner is rotated. Second and third lenses arranged in a 4-f combination are used to image rotated focal spots along a spherical convex surface of a sample while the optical path length stays constant. Slow scanning in other dimensions can be performed by mechanical means.
REFERENCES:
patent: 4030830 (1977-06-01), Holly
patent: 4373774 (1983-02-01), Dubroeucq et al.
patent: 4629319 (1986-12-01), Clarke et al.
patent: 4920385 (1990-04-01), Clarke et al.
patent: 5035476 (1991-07-01), Ellis et al.
patent: 5504345 (1996-04-01), Bartunek et al.
patent: 5623928 (1997-04-01), Wright et al.
patent: 5667373 (1997-09-01), Wright et al.
Publication, "Subsurface Defect Detection in Ceramic Materials Using Opti Gating Techniques", by P.R. Battle et al., Optical Engineering, vol. 35 (4), pp. 1119-1123 (1996).
Publication, "Subsurface Defect Detection in Ceramics Using an Optical Gated Scatter Reflectometer", by Mark Bashkansky et al., Journal of American Ceramic Society, vol. 79, No. 5, pp. 1397-1400 (1996).
Publication, "Subsurface Defect Detection in Ceramics by High-Speed High-Resolution Optical Coherent Tomography", by M. Bashkansky et al., Optics Letters, vol. 22, No. 1, pp. 61-63 (1997).
Publication, "Femtosecond Optical Ranging in Biological Systems", by Fujimoto et al., Optics Letters, vol. 11, No. 3, pp. 150-152, (1986).
Publication, "Optical Coherence--Domain Reflectometry: A New Optical Evaluation Technique", by Youngquist et al., Optics Letters, vol. 12, No. 3, pp. 158-160, (1987).
Publication,"Coherent Optical Tomography of Microscopic Inhomogeneities in Biological Tissues", by Gelkonov et al., JETP Letters, vol. 61, No. 2, pp. 158-162, (1995).
Bashkansky Mark
Duncan Michael
Reintjes John
Edelberg Barry A.
Miles Edward F.
Phan James
The United States of America as represented by the Secretary of
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