Rapid cooling system for RTP chamber

Details Rapid cooling system for RTP chamber Rapid cooling system for RTP chamber

2011-03-15

2011-03-15

Ciric, Ljiljana (Lil) V (Department: 3785)

Refrigeration

Intermediate fluid container transferring heat to heat...

Flow line connected transfer fluid supply and heat exchanger

C062S062000, C062S064000, C062S052100, C062S304000, C062S407000, C134S007000, C134S037000, C438S016000, C438S678000

Reexamination Certificate

active

07905109

ABSTRACT:
A rapid cooling system for a rapid thermal processing chamber includes a rapid thermal processing chamber having a wafer support for supporting a wafer. A tank having a supply of cooling liquid is provided in fluid communication with the chamber. A pump is provided in fluid communication with the rapid thermal processing chamber and the tank for pumping the cooling liquid from the tank to the chamber and cooling the wafer during the cooling phase of rapid thermal processing.

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