Raised microstructure of silicon based device

Details Raised microstructure of silicon based device Raised microstructure of silicon based device

2006-01-17

2006-01-17

Le, Huyen (Department: 2646)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S191000

Reexamination Certificate

active

06987859

ABSTRACT:
A raised microstructure for use in a silicon based device, such as a microphone, is disclosed. The raised microstructure comprises a generally planar film having a ribbed sidewall supporting the film.

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