Railway carrier apparatus for semiconductor wafers

Details Railway carrier apparatus for semiconductor wafers Railway carrier apparatus for semiconductor wafers

1987-11-25

1990-02-27

Bertsch, Richard A.

Railways

Monorail

104119, 104 96, 104 88, B65G 4300

Patent

active

049036106

ABSTRACT:
A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.

REFERENCES:
patent: 2710221 (1955-06-01), Hinners
patent: 4007533 (1977-02-01), Brandon et al.
patent: 4279201 (1981-07-01), Solomon
patent: 4336757 (1982-06-01), Toder
patent: 4451079 (1984-05-01), Takahashi

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