Radio frequency probing apparatus for surface acoustic wave devi

Details Radio frequency probing apparatus for surface acoustic wave devi Radio frequency probing apparatus for surface acoustic wave devi

1984-05-04

1986-12-02

Karlsen, Ernest F.

Electricity: measuring and testing

Plural, automatically sequential tests

324158F, 324158P, 324158R, G01R 3102, G01R 3128

Patent

active

046267751

ABSTRACT:
Wafer probing apparatus especially adapted to probing surface acoustic wave (SAW) device die such as delay lines is disclosed; the apparatus includes a probe card especially suited to the radio frequency and multiple output nature of a SAW delay line together with a computer-aided electronic system for exciting the delay line and evaluating its output.

REFERENCES:
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patent: 3590375 (1971-06-01), Sills
patent: 3919632 (1975-11-01), Roerty
patent: 3932809 (1976-01-01), Frank
patent: 4116523 (1978-09-01), Coberly et al.
patent: 4140968 (1979-02-01), Barry
patent: 4161692 (1979-07-01), Tarzwell
patent: 4390837 (1983-06-01), Hotvedt
Faran, Jr., J. J.; "Methods of Assignments . . . "; 1982 IEEE Test Conference; 1982; pp. 641-647.

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