Radio frequency power generator

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means

Reexamination Certificate

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C250S300000, C315S111510

Reexamination Certificate

active

11186483

ABSTRACT:
A RF power generator for exciting inductively coupled plasma for spectrometry includes an induction coil for exciting the plasma as part of its load circuit. The load circuit also comprises a capacitor connected in parallel with the induction coil. The RF power generator is a free running oscillator having a switching circuit of two MOSFETs alternately switchable on and off via a feedback control circuit from the load circuit. RF power from the switching circuit is coupled to the load circuit via an inductor. The inductor and load circuit is resonant at a first frequency, which is lower than the operating frequency of the power generator.

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patent: 2004/0263412 (2004-12-01), Pribyl

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