Radio frequency plasma generator

Details Radio frequency plasma generator Radio frequency plasma generator

1987-06-12

1988-12-20

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load

Plural cathode and/or anode discharge device load

315 34, 315 39, 315 59, 3151691, 315194, 315248, 31511121, 313581, 313606, 313607, 313621, 31323131, 313307, H01J 100

Patent

active

047927321

ABSTRACT:
A plasma generator for exciting electrons in the plasma to a uniform energy evel. In a perferred embodiment, two sets of mutually perpendicular electrodes surround a container of gas, with one set being driven through a ninety degree phase shifter to establish a circularly polarized field in the space within the container. Alternative means are disclosed for launching circularly polarized RF waves into the container of gas. A desired level of uniform electron energy is achieved by establishing the proper relationship between the frequency and magnitude of the applied circularly polarized field and the mean free path of the electrons in the plasma.

REFERENCES:
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patent: 3022236 (1962-02-01), Ulrich et al.
patent: 3418206 (1968-12-01), Hall et al.
patent: 3541372 (1970-11-01), Omura et al.
patent: 3663858 (1972-05-01), Lisitano
patent: 3665245 (1972-05-01), Schwarz
patent: 3873884 (1975-03-01), Gabriel et al.
patent: 3984727 (1976-10-01), Young
patent: 4389593 (1983-06-01), De Santis et al.

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