Radio frequency Langmuir probe

Details Radio frequency Langmuir probe Radio frequency Langmuir probe

2006-03-21

2006-03-21

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S464000

Reexamination Certificate

active

07015703

ABSTRACT:
A Langmuir probe for measuring characteristics of a plasma driven by radio frequency (RF) power comprises an elongated conductor10having an exposed tip1for insertion into an RF plasma and an outer end3for connection to external measuring circuitry. In order to reduce distortion over a range of RF frequencies, the probe includes an RF voltage divider11, 12, 13, 14in series between the tip and outer end of the conductor.

REFERENCES:
patent: 5339039 (1994-08-01), Carlile et al.
patent: 6189483 (2001-02-01), Ishikawa et al.
patent: 6553853 (2003-04-01), Marsh et al.
patent: 6653852 (2003-11-01), Benjamin
patent: 6861844 (2005-03-01), Verdeyen et al.
patent: 6894474 (2005-05-01), Cox et al.
Paranjpe, et al., “A tuned Langmuir probe for measurements in rf glow discharges,” J. Appl. Phys. vol. 67, No. 11, pp. 6718-6727 (Jun. 1, 1990).

Affiliated with

Also associated with

Rating

Radio frequency Langmuir probe does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radio frequency Langmuir probe, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radio frequency Langmuir probe will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3546222