Radio frequency induction plasma processing system utilizing a u

Details Radio frequency induction plasma processing system utilizing a u Radio frequency induction plasma processing system utilizing a u

1992-01-30

1994-01-18

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912143, 21912141, 20429831, 156345, 156646, B23K 900

Patent

active

052801543

ABSTRACT:
A plasma processing apparatus comprising: a chamber for supporting a workpiece; an inlet for introducing a gas into the chamber; a coil of conductive material having a generally flattened configuration whereby to provide a at least one generally planar surface defined by parallel conductors disposed on the chamber; and apparatus for applying radio frequency energy to the coil.

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"Development of rf plasma generators for neutral beams" M. C. Vella et al. J. Vac. Sci. Technol A. vol. 3, No. 3 May/Jun. 1985 pp. 1219-1221.

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