Radio frequency hollow cathode

Details Radio frequency hollow cathode Radio frequency hollow cathode

1988-10-27

1990-09-04

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31323131, H01J 724

Patent

active

049547518

ABSTRACT:
A cathode has a pair of cavities in which are disposed respective electrically isolated electrodes. An inert gas is introduced individually into the cavities. Individually outletting from those cavities are a pair of respective apertures. Radio frequency energy is applied to the electrodes to establish a plasma.

REFERENCES:
patent: 4080549 (1978-03-01), Creedon et al.
patent: 4087720 (1978-05-01), Takagi
patent: 4297615 (1981-10-01), Goebel et al.
patent: 4412153 (1983-10-01), Kalbfus et al.
patent: 4447732 (1984-05-01), Leung et al.
patent: 4543465 (1985-09-01), Sakudo et al.
patent: 4570106 (1986-02-01), Sohval et al.
patent: 4608513 (1986-08-01), Thompson
patent: 4615588 (1986-10-01), Goldhar
patent: 4645977 (1987-02-01), Kurokawa et al.

Affiliated with

Also associated with

Rating

Radio frequency hollow cathode does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radio frequency hollow cathode, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radio frequency hollow cathode will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-444209