Radiation system, lithographic apparatus, device...

Details Radiation system, lithographic apparatus, device... Radiation system, lithographic apparatus, device...

2007-09-25

2007-09-25

Nguyen, Kiet T. (Department: 2881)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C359S011000, C359S022000

Reexamination Certificate

active

10976156

ABSTRACT:
A radiation system for multiplexing radiation includes two radiation sub-sources. The sub-sources each provide a certain amount of radiation. The system further includes a member with reflecting surfaces. The surfaces are arranged in such a way that they receive the radiation from the sub-sources and combine this radiation. The radiation sub-sources may operate simultaneously or alternately. The surfaces may perform functions such as filtering or (de)magnifying.

REFERENCES:
patent: 6559998 (2003-05-01), Yamakawa
patent: 6885432 (2005-04-01), Tsuji

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