Radiation system and lithographic apparatus

Details Radiation system and lithographic apparatus Radiation system and lithographic apparatus

2008-07-08

2008-07-08

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C250S492200

Reexamination Certificate

active

11602475

ABSTRACT:
The invention relates to a radiation system for generating a beam of radiation. The radiation system includes an extreme ultraviolet source constructed and arranged to generate extreme ultraviolet radiation, a contamination barrier constructed and arranged to trap contamination from the radiation source, and a temperature sensor constructed and arranged to sense a temperature of the contamination barrier.

REFERENCES:
patent: 7212274 (2007-05-01), Hara et al.
patent: 2003/0045098 (2003-03-01), Verhaverbeke et al.
patent: 2006/0175558 (2006-08-01), Bakker et al.
patent: 1 491 963 (2004-12-01), None
patent: 1 491 963 (2005-08-01), None

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