Radiation-stimulated deposition of aluminum

Details Radiation-stimulated deposition of aluminum Radiation-stimulated deposition of aluminum

1983-04-04

1984-12-18

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

2041571R, C23C 1700

Patent

active

044891024

ABSTRACT:
A method for depositing aluminum films on a substrate comprises exposing the substrate to vapors of an aluminum hydride-trialkylamine complex and exposing the surface to ultraviolet light in the areas where aluminum deposition is desired.

REFERENCES:
patent: Re27606 (1973-04-01), Schmidt et al.
patent: 3271180 (1966-09-01), White
patent: 3364087 (1968-01-01), Solomon et al.
patent: 3375129 (1968-03-01), Carley et al.
patent: 3386823 (1968-06-01), Keller et al.
patent: 3462288 (1969-08-01), Schmidt et al.
patent: 4006269 (1977-02-01), Kerfoot
patent: 4324854 (1982-04-01), Beauchamp et al.
Physics Today Oct. 1980, pp. 21,22.
Ehrlich et al. IEEE Journal of Quantum Electronics vol. QE-16 No. 11, Nov. 1980, pp. 1233-1243.

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