Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reissue Patent
2006-11-16
2010-06-01
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S50400H, C250S493100, C250S492220, C250S491100, C250S559400, C250S559410, C379S119000, C392S324000, C392S389000, C355S053000, C355S067000, C355S030000, C315S111210, C315S039000, C378S034000
Reissue Patent
active
RE041362
ABSTRACT:
A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.
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Bijkerk Frederik
Ivanov Vladimir Vital'evitch
Korop Evgenii Dmitreevitch
Koshelev Konstantin Nikolaevitch
Zukavishvili Givi Georgievitch
ASML Netherlands B.V.
Berman Jack I
Pillsbury Winthrop Shaw & Pittman LLP
Sahu Meenakshi S
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