Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-06-19
2007-06-19
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S493100, C378S034000
Reexamination Certificate
active
11393325
ABSTRACT:
In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without substantially reducing the radiation transmission. A vacuum chamber which encloses a radiation-emitting plasma and is outfitted with at least one feed line and one outlet line for a buffer gas in order to ensure protection against debris for at least one optical element which directs the radiation to a radiation outlet opening in the vacuum chamber has chamber areas with particle deceleration of varying magnitude by the buffer gas. The particle deceleration is greater at least in a first chamber area in which the optical element is arranged than in any other chamber area.
REFERENCES:
patent: 6506253 (2003-01-01), Sakuma
patent: 6586757 (2003-07-01), Melnychuk et al.
patent: 6972421 (2005-12-01), Melnychuk et al.
patent: 7049614 (2006-05-01), Rice
patent: 7080563 (2006-07-01), Fujimoto
patent: 7164144 (2007-01-01), Partlo et al.
patent: 7167232 (2007-01-01), Banine et al.
patent: 2002/0035962 (2002-03-01), Sakuma
patent: 2004/0108473 (2004-06-01), Melnychuk et al.
patent: 2004/0178365 (2004-09-01), Rice
patent: 2005/0115333 (2005-06-01), Fujimoto
patent: 2005/0139785 (2005-06-01), Banine et al.
patent: 2005/0199829 (2005-09-01), Partlo et al.
patent: 2005/0230645 (2005-10-01), Melnychuk et al.
patent: 2006/0017026 (2006-01-01), Hergenhan et al.
patent: 2006/0043319 (2006-03-01), Gaebel et al.
patent: 2006/0226377 (2006-10-01), Hergenhan et al.
patent: 2006/0243927 (2006-11-01), Tran et al.
patent: 2006/0273732 (2006-12-01), Korobochko et al.
patent: 1 329 772 (2003-07-01), None
patent: 1 396 758 (2003-08-01), None
patent: 1 434 095 (2004-06-01), None
Brauner Thomas
Gaebel Kai
Hergenhan Guido
Reed Smith LLP
Souw Bernard
Wells Nikita
XTREME Technologies GmbH
LandOfFree
Radiation source for the generation of short-wavelength... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Radiation source for the generation of short-wavelength..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiation source for the generation of short-wavelength... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3821453