Radiation source-detection unit employing a grating having two g

Details Radiation source-detection unit employing a grating having two g Radiation source-detection unit employing a grating having two g

1993-12-29

1996-03-19

Sniezek, Andrew L.

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

369112, 369 4414, G11B 700

Patent

active

055008461

ABSTRACT:
A device for scanning a surface includes a radiation source, a transparent plate provided with a grating having two grating structures, an objective system for focusing the radiation beam on a surface, and a detection system for converting radiation reflected by the surface into electric signals. The first grating structure in the grating is intended, for example, for forming two side beams from the radiation beam. By providing the second grating structure, a monitor beam is obtained in reflection from the radiation beam. The monitor beam is directed onto a monitor detector which generates an electric signal with which the radiation power of the radiation source is controlled.

REFERENCES:
patent: 4358200 (1982-11-01), Heemskerk et al.
patent: 4665310 (1987-05-01), Heemskerk et al.
patent: 4924079 (1990-05-01), Opheij et al.
patent: 5212572 (1993-05-01), Krantz et al.
patent: 5233595 (1993-08-01), Kawakubo

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