Radiation shielding coating

Details Radiation shielding coating Radiation shielding coating

2006-05-02

2006-05-02

Freay, Charles G. (Department: 3746)

Pumps

Processes

C417S373000, C417S572000, C417S901000, C062S055500

Reexamination Certificate

active

07037083

ABSTRACT:
A vacuum conduit connected to a vacuum pump has a shield surface which absorbs radiation to reduce the total radiation falling on the vacuum pump. The vacuum system includes the vacuum conduit connected between a process chamber and the vacuum pump and a surface treatment along at least a portion of the shield surface adapted to absorb radiation. Since the treatment is on the interior surface of the vacuum conduit and does not extend into the center of the conduit, gaseous flow to the pump is not impeded. In this manner radiation entering the vacuum pump and falling on the cryogenic array is reduced without impeding gaseous flow to the cryogenic surface. The system therefore minimizes the radiation load on the cryogenic array in the vacuum pump without impeding the gaseous flow through the vacuum pump.

REFERENCES:
patent: 3256706 (1966-06-01), Hansen
patent: 3321927 (1967-05-01), Hood, Jr.
patent: 4121430 (1978-10-01), Bachler et al.
patent: 4150549 (1979-04-01), Longsworth
patent: 4212170 (1980-07-01), Winkler
patent: 4219588 (1980-08-01), Longsworth
patent: 4275566 (1981-06-01), Bonn
patent: 4336690 (1982-06-01), Welch
patent: 4356701 (1982-11-01), Bartlett et al.
patent: 4446702 (1984-05-01), Peterson et al.
patent: 4454722 (1984-06-01), Bartlett et al.
patent: 4474036 (1984-10-01), Ball et al.
patent: 4499354 (1985-02-01), Hill et al.
patent: 4546613 (1985-10-01), Eacobacci et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4691534 (1987-09-01), Lombardini et al.
patent: 4815303 (1989-03-01), Duza
patent: 4834136 (1989-05-01), Bourke et al.
patent: 4860546 (1989-08-01), Harvell et al.
patent: 4862697 (1989-09-01), Tugal et al.
patent: 4873833 (1989-10-01), Pfeiffer et al.
patent: 5083445 (1992-01-01), Saho et al.
patent: 5156007 (1992-10-01), Bartlett et al.
patent: 5483803 (1996-01-01), Matte et al.
patent: 5537833 (1996-07-01), Matte et al.
patent: 5542257 (1996-08-01), Mattern-Klosson et al.
patent: 5548964 (1996-08-01), Jinbo et al.
patent: 5906102 (1999-05-01), Bartlett et al.
patent: 5906103 (1999-05-01), Matte
patent: 6038867 (2000-03-01), Einziger et al.
patent: 6053704 (2000-04-01), Yamamoto et al.
patent: 2003/0010383 (2003-01-01), Matte et al.
US 4,266,959, 05/1981, Welch (withdrawn)
Mark's Standard Handbook for Mechanical Engineers, 10th edition, McGraw-Hill, Boston Massachusetts; 1996, pp. 4-62 and 4-64.

Affiliated with

Also associated with

Rating

Radiation shielding coating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radiation shielding coating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiation shielding coating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3533431