Radiation sensor device and radiation source module...

Details Radiation sensor device and radiation source module... Radiation sensor device and radiation source module...

2007-10-16

2007-10-16

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

10952479

ABSTRACT:
A radiation sensor device comprising a body portion having an entrance through which radiation may enter the body portion, a radiation detector and an optical filter interposed between the entrance and the radiation detector. The radiation detector is capable of detecting radiation having at least one wavelength in the range of from about 125 nm to about 1100 nm, and comprises: (i) a silicon-containing material comprising an n-doped layer disposed on a pair of p-doped layers, and (ii) a passivation layer disposed on a radiation impingement surface of the silicon-containing material, the passivation layer comprising nitrided silicon dioxide, a metal silicide and mixtures thereof. The optical filter has: (i) an optical transmittance of at least about 40% at a wavelength in the range of from about 175 nm to about 300 nm, and (ii) an optical transmittance of no greater than about 5% at a wavelength greater than about 350 nm.

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Canfield et al., “Absolute silicon photodiodes for 160 nm to 254 nm photons”, Metrologia, 1998, 35, pp. 329-334.

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