Radiation-sensitive positive resist composition

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

430165, 430192, 430193, G03F 7023

Patent

active

054569958

ABSTRACT:
A positive resist composition which comprises, in admixture, a photosensitive 1,2-quinone diazide compound, an alkali-soluble resin to bind ingredients and polyphenol compound to control a dissolution rate in a developer represented by the formula: ##STR1## wherein R is C.sub.1-18 or hydrogen, the composition is sensitive to radiation and has good balance of sensitivity, resolving power and heat resistance.

REFERENCES:
patent: 469540 (1887-09-01), Chang
patent: 3188210 (1965-06-01), Fritz et al.
patent: 4390664 (1983-06-01), Kanayama
patent: 4477553 (1984-10-01), Yamamoto et al.
patent: 4536465 (1985-08-01), Uchara et al.
patent: 4650741 (1987-03-01), Miura et al.
patent: 4738915 (1988-04-01), Komine et al.
patent: 4797346 (1989-01-01), Yamamoto et al.
patent: 4812551 (1989-03-01), Oi et al.
patent: 4883738 (1989-11-01), Sakaguchi et al.
patent: 4920028 (1990-04-01), Lazarus et al.
patent: 5019479 (1991-05-01), Oka et al.
patent: 5128230 (1992-07-01), Templeton et al.
patent: 5215856 (1993-06-01), Jayaraman
Patent Abstracts of Japan, vol. 9, No. 323, p. 414, (Dec. 1985), JP 60150047(1).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Radiation-sensitive positive resist composition does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radiation-sensitive positive resist composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiation-sensitive positive resist composition will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2309636

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.