Radiation sensitive polymeric material

Details Radiation sensitive polymeric material Radiation sensitive polymeric material

1984-09-19

1986-04-08

Michl, Paul R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

522118, 427 36, 427 38, 524303, 524392, 430286, 430325, C08F 834

Patent

active

045814015

ABSTRACT:
A radiation sensitive polymeric material comprising a copolymer of methyl methacrylate and allyl methacrylate and at least one organosulfur compound having at least two --SH groups per molecule, said material being useful as a polymer resist sensitive to high energy radiation.

REFERENCES:
patent: 3257340 (1966-06-01), Osmond
patent: 3772258 (1973-11-01), Lachowicz
patent: 3978022 (1976-08-01), Carson
patent: 4152506 (1979-05-01), Novak
patent: 4246382 (1981-01-01), Honda
patent: 4289842 (1981-09-01), Tan et al.
Chem. Abstracts, 94, 165698n.
Taylor et al., J. Electrochem. Soc., 127, 2665-2674 (1980).

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