Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1993-07-26
1994-06-28
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430165, 430191, 430193, 430270, 430326, G03F 7023, G03F 730
Patent
active
053246209
ABSTRACT:
A radiation-sensitive composition dissolved in a solvent comprising:
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Bowers Jr. Charles L.
Chu John S.
OCG Microeletronic Materials, Inc.
Simons William A.
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