Radiation pulse energy control system, lithographic...

Details Radiation pulse energy control system, lithographic... Radiation pulse energy control system, lithographic...

2006-09-05

2009-12-01

Vanore, David A. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C372S025000, C355S117000

Reexamination Certificate

active

07626182

ABSTRACT:
A system for controlling the energy of radiation pulses. A detector monitors energy of the pulses and an optical shutter trims the radiation pulses after a suitable optical delay line. The accuracy of the control of the energy of the radiation pulses can be improved by matching a rate of response of the radiation detector to a rate of response of the optical shutter.

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