Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Patent
1997-12-11
2000-02-15
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
25037008, 25037009, 438 64, G01T 124
Patent
active
060255986
ABSTRACT:
A glass substrate holding apparatus for holding a glass substrate formed with a semiconductor thin film element has a first elastic member disposed on the substantially outer peripheral portion of a surface opposite to that surface of the glass substrate on which the semiconductor thin film element is formed, a mounting member disposed so as to hold the first elastic member between itself and the glass substrate, and a second elastic member disposed in a space surrounded by the glass substrate, the first elastic member and the mounting member, and interposed between the glass substrate and the mounting member.
REFERENCES:
patent: 5276329 (1994-01-01), Hughes
patent: 5661309 (1997-08-01), Jeromin et al.
patent: 5804832 (1998-09-01), Crowell et al.
Canon Kabushiki Kaisha
Hannaher Constantine
Israel Andrew
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