Radiation imaging element

Details Radiation imaging element Radiation imaging element

2008-11-20

2010-12-21

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

Reexamination Certificate

active

07855369

ABSTRACT:
A radiation imaging element that includes radiation sensors disposed in a matrix so as to output signal charges corresponding to radiation transmitted through a subject, and TFTs for readout of signals from the radiation sensors, whereinthe TFT has at least a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode,the active layer has at least a first region and a second region which has an electric conductivity larger than an electric conductivity of the first region,the second region is in contact with the gate insulating layer, andthe first region is disposed so as to be electrically connected between the second region and at least one of the source electrode or the drain electrode.A radiation imaging element that effectively suppresses noise and also achieves a high quality image is provided.

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