Radiation imaging device

Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system

Reexamination Certificate

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Reexamination Certificate

active

07847258

ABSTRACT:
A radiation imaging device12has a phosphor film8; a photoelectric conversion portion13including an upper electrode6, a lower electrode2, and a photoelectric conversion film4disposed between the electrodes; a signal output portion14including a field effect thin film transistor10having an active layer24formed from an amorphous oxide and that outputs a signal corresponding to electric charges generated by the photoelectric conversion portion; and a substrate1on which the signal output portion, the photoelectric conversion portion and the phosphor film are formed in this order. Each of pixel portions is made up of the signal output portion, the photoelectric conversion portion and the phosphor film, and the signal output portion and the photoelectric conversion portion in each of the pixel portions are formed so as to have an overlapping portion in a thickness direction.

REFERENCES:
patent: 2005/0205903 (2005-09-01), Hioki
patent: 2006/0108529 (2006-05-01), Saito et al.
patent: 2007/0114447 (2007-05-01), Shoji et al.
patent: 8-116044 (1996-05-01), None
patent: 2005-303266 (2005-10-01), None
patent: 2006-86493 (2006-03-01), None

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