Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Patent
1992-07-10
1993-06-15
Wojciechowicz, Edward
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
257547, 257648, 257921, 437 40, 437 63, 437 70, 437 50, 437196, H01L 2712, H01L 21265
Patent
active
052201929
ABSTRACT:
A radiation hardened NMOS transistor structure suited for application to radiation hardened CMOS devices, and the method for manufacturing it is disclosed. The new transistor structure is characterized by "P" doped guard bands running along and immediately underlying the two bird's beak regions perpendicular to the gate. The transistor and the CMOS structure incorporating it exhibit speed and size comparable to those of conventional non-rad-hard CMOS structure, relatively simple manufacturing, and excellent total-dose radiation hardness.
REFERENCES:
patent: 4498227 (1985-02-01), Howell et al.
Lyu Mike
Owens Alexander H.
Toutounchi Shahin
Yee Abraham
Linden Gerald E.
LSI Logic
Rostoker Michael D.
Wojciechowicz Edward
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