Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-05-09
2009-11-10
Vanore, David A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S42300F, C250S428000, C250S492100, C250S493100
Reexamination Certificate
active
07615767
ABSTRACT:
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.
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Soer Wouter Anthon
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Maskell Michael
Pillsbury Winthrop Shaw & Pittman LLP
Vanore David A
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