Radiation detector, sensor module having a radiation...

Details Radiation detector, sensor module having a radiation... Radiation detector, sensor module having a radiation...

2007-01-02

2007-01-02

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C136S224000

Reexamination Certificate

active

11031480

ABSTRACT:
A radiation detector, a method for manufacturing a radiation detector, and a sensor module having a radiation detector. The radiation detector may include a thermopile chip having a diaphragm, a first cavity formed underneath the diaphragm, a thermopile structure formed on the diaphragm and an absorber layer applied to the thermopile structure, a cover chip, which has a second cavity on its bottom and is attached to the thermopile chip in such a way that the diaphragm having the thermopile structure and the absorber layer is located between the first cavity and the second cavity and, a filter plate attached to the cover chip via an adhesive layer of a defined layer thickness for transmitting infrared radiation of a defined wavelength range. Spacer means, for example, spacers may be provided for the defined layer thickness.

REFERENCES:
patent: 5962854 (1999-10-01), Endo
patent: 2004/0187904 (2004-09-01), Krellner et al.

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