Radiation detector and method of manufacture thereof

Details Radiation detector and method of manufacture thereof Radiation detector and method of manufacture thereof

2005-07-19

2005-07-19

Porta, David (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

C427S601000, C118S728000, C250S336100, C250S370010

Reexamination Certificate

active

06919569

ABSTRACT:
A solid-state imaging element2having a light-receiving portion where a plurality of photoelectric conversion elements21are arranged, and electrode pads22electrically connected to the photoelectric conversion elements21is mounted on a substrate1. A scintillator3is formed on the surface of the light-receiving portion of the solid-state imaging element. Around a support surface10where the solid-state imaging element2of the substrate1is mounted, holding portions14and15are formed on opposing side walls to hold and project the surface of the light-receiving portion from a vapor deposition holder toward a vapor deposition chamber in forming the scintillator3.

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