Radiation detector and method

Details Radiation detector and method Radiation detector and method

2008-06-20

2009-11-03

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

Reexamination Certificate

active

07612344

ABSTRACT:
A radiation detector and method. One embodiment provides a radiation detector including a semiconductor body with a first base zone of a first conduction type and with at least one second base zone arranged at least partly in the first base zone, extending in a vertical direction of the semiconductor body and doped complementarily to the first base zone. The method provides a semiconductor substrate. Several epitaxial layers are produced arranged one above another on the semiconductor substrate. The layers in each case include a basic doping of the first conduction type and together with the semiconductor substrate form the semiconductor body. Semiconductor zones of a second conduction type are produced.

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Kenney et al., Observation of Beta and X Rays with 3-D-Architecture Silicon Microstrip Sensors, IEEE, 2001, pp. 189-193.

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