Radiation damage reduction

Details Radiation damage reduction Radiation damage reduction

2006-04-18

2006-04-18

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C438S057000, C427S492000, C427S496000

Reexamination Certificate

active

07031796

ABSTRACT:
A method for limiting exposure of a substrate to potentially damaging radiation from a radiating apparatus. A database of information associated with the substrate is compiled, and the substrate is identified prior to processing the substrate on the radiating apparatus. The database of information associated with the substrate is accessed, including its past irradiation history of dosage and type of irradiation, based on the substrate identification, and the operation of the radiating apparatus is selectively modified based at least in part on the information associated with the substrate.

REFERENCES:
patent: 5107275 (1992-04-01), Tsuruoka et al.
patent: 6023068 (2000-02-01), Takahashi
patent: 6609040 (2003-08-01), Brunnemann
patent: 6915172 (2005-07-01), Parent et al.
patent: 2002/0070469 (2002-06-01), Hiatt et al.

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