Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-08-30
2010-11-02
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S067000, C355S077000, C359S238000, C359S245000, C359S257000, C359S322000
Reexamination Certificate
active
07826037
ABSTRACT:
A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.
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Notice of Allowance mailed Apr. 7, 2010 for U.S. Appl. No. 11/598,837, 7 pgs.
De Bruijn Cornelis Cornelia
Meijerink Marcus Gerhardus Hendrikus
Noordman Oscar Franciscus Jozephus
Schreel Koenraad Remi André Maria
Vink Henri Johannes Petrus
ASML Netherlands B.V.
Mathews Alan A
Sterne, Kessler, Goldstein & Fox P.L.L.C
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