Electric resistance heating devices – Heating devices – Continuous flow type fluid heater
Patent
1989-05-19
1991-10-01
Evans, Geoffrey S.
Electric resistance heating devices
Heating devices
Continuous flow type fluid heater
F24H 100
Patent
active
050541072
ABSTRACT:
A fluid heating system, which includes a set of lamps emitting infrared or longer wavelength radiation. The fluid to be heated flows through chemically inert tubing while absorbing radiation from the lamps. The lamps are separated from the tubing, so that there is no significant risk that contaminants will enter the tubing during operation. In one class of preferred embodiments particularly well suited for heating ultrapure water, the inert tubing is a quartz coil. Lamps are mounted inside the coil generally parallel to the coil axis. Reflective material is wrapped around the outer surface of the coil to reflect radiation that has passed through the coil back toward the coil axis. The quartz comprising the coil is selected to transmit the lamp radiation efficiently to the fluid within the coil. In one embodiment, the lamps are mounted between a pair of end plate assemblies. Unheated process fluid flowing through chemically inert tubing which lines a spiral duct within each end plate assembly absorbs heat from the lamp ends, thereby preventing the lamps from overheating, before entering an inlet in the quartz coil.
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Fluidix Inc. doc., "Self-Containing Point of Use Heaters", undated.
Process Technology Corporation ("Protec") doc., New Quartz Ultrapure Heater System, received by applicant Dec. 1988.
Demco doc., Nov. 7, 1986, received by applicant in 1987.
Semiconductor Process Equipment Corporation ("SPEC") doc., Fluid Heating System Model: FHW 2.0, received by applicant Dec. 1988.
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